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Metrology
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Lithography
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Rutgers Nanofabrication Core Facility
Rutgers School of Engineering (SoE) Nanofabrication CORE Facility (NCF) is open for Rutgers and non-Rutgers users.
Our core objectives include:
- Supporting research activities of Rutgers School of Engineering
- Educating undergraduate and graduate students with skills and capabilities that can be readily applied in high-tech semiconductor industries and research institutes
- Promoting research collaborations between research centers and industrial organizations
- Bringing in funding for research through Grants, User Access Fees and Training Programs
- Leading the applications of federal and state-funded competitive funding
Please see the "Capabilities" tab to find out more about the tools and processes available. To become an accredited Rutgers NCF user, please find more details in the “Become a User” tab.
To explore the latest news and updates, refer to "News" tab. News tab features various upcoming, ongoing and past education/research activities and impacts.
Our NCF "Team" page shows our team members with their roles and responsibilities.
"Grants" tab showcases our team's effort on bringing funding from federal and state agencies to continuously improve our NCF capabilities.
Questions on where we are located and how to reach us, click on "Contact" tab.
10/19/2023
09/23/2026
A group of students and academics from Department of Physics and Astronomy visiting NCF cleanroom as part of the course focusing on critical materials and technologies, and their impact on society.
05/03/2026
Dr. Zin has presented the research topic of "Unlocking Capabilities of Ozonated Oxide for Si Solar Cells with Passivated Contact Technologies" at MRS 2026. The research was funded by the Department of Energy.
04/20/2026
Undergraduate and Graduate students from ECE attending the sputtering process and characterizations demonstrated by NCF team (Dr. Zin, Dr. Wang and Dr. Sharma) on 4/15 and 4/20.
03/04/2026
Undergraduate and Graduate students from ECE attending the fundamentals of lithography process demonstrated by NCF team (Dr. Zin, Dr. Wang and Dr. Sharma) on 3/04 and 2/25.
11/21/2025
NCF team (Bhoopal, Rahul, Huazhong and Ngwe) completed the I-Corp: Propelus Fall 2025 Program. The team undertook the intensive customer discovery activities toward the project topic of developing Biosensing devices by Maskless Lithography technqiues.
11/06/2025
ECE undergraduate students attending the lecture and demonstrations of dopant diffusion process and characterizations techniques.
10/24/2025
Dr. Zin has been nominated by faculty and staff colleagues across Rutgers School of Engineering to become a recipient of 2025 Rutgers Engineering Outstanding Performance Award.
08/20/2025
Nanofabrication CORE Facility partners with IEEE TryEngineering for STEM Educations.
More information can be found through the link here: https://soe.rutgers.edu/news/soe-partners-ieee-tryengineering-host-nj-s…
07/31/2025
Hosting and conducting seminars to K-12 teachers as part of IEEE TryEngineering Educator Session 2025.
05/05/2025
Students attending the lectures and demonstrations of fundamentals of Diffusion, RTA Annealing and Sheet Resistance Measurements.
03/12/2025
Students attending the lectures and demonstrations of fundamentals of Oxidation, Lithography Patterning and Characterizations.
12/18/2024
Dr. Zin and his team has published the effects of Spin-Dry technique on the surface passivation of Crystalline Silicon structures.
https://doi.org/10.1002/pssr.202400314
11/21/2024
Students attending the fundamentals of Atomic Layer Deposition and Characterizations, and Lab Demonstrations.
08/15/2024
Dr. Zin and his colleagues developed a novel proximity doping technique that ca be used in semiconductor, photovoltaic, MEMS, and Optical devices. A Patent Cooperation Treaty application (PCT/US24/42494) has been filed for this novel technique.
08/05/2024
NJ teachers attending the IEEE TryEngineering Educators for Semiconductors Workshop.
04/01/2024
Students attending the lithography pattern development process prior to the demonstration.
01/29/2024
ECE Students taking part in the lab demonstration of Microelectronic Processing Course.
11/16/2023
ECE students taking part in the lab teaching and demonstration of the fundamental of Plasma Enhanced Chemical Vapor Deposition Synthesized Silicon Nitride, and characterization by the Ellipsometry.
10/19/2023
A group of ECE students attending the demonstration of measuring diffusion sheet resistance of semiconductor wafers, as part of “Semiconductors for AI” course in the 2023 fall semester.
Dr. Zin
Dr. Ngwe Zin
Dr. Zin is a director and principal investigator of Rutgers Nanofabrication CORE Facility (NCF). He is also a graduate faculty of ECE at Rutgers. As a PI of NCF, Dr. Zin manages/leads the operations, upgrade, installation, commissioning, and maintenance of Micro/Nanofabrication equipment and instruments, and facility abatements. He also teaches microelectronic fundamentals, devices processing and characterization, and silicon photovoltaic in state-of-the-art nanofabrication cleanroom. His current research interest includes, not limited to, Photovoltaics, Micro/Nanofabrication, Novel Materials, Simulation, Characterization, Fabrication of Semiconductor Devices and High-Tech Manufacturing. Dr. Zin supervises postdocs, PhD/Master/undergraduate students. Dr. Zin received multiple research grants with the total award value of $1.8M to date.
Engineering and Research Staff members
Dr. Henry Wang
Dr. Wang is the lab coordinator of NCF. Dr. Wang conducts training for new users, undertakes the maintenance and safe operations of equipment/instruments, facility abatements, inventory tracking, installation of new equipment, decommissioning of old equipment, training of new users and lab demonstrations.
Malvika Chainani Info
Former Students
Mr. Jinam Modasiya (Summer 2023-2024)
Jinam was a senior of ECE undergraduate program and worked under Dr. Zin’s supervision to investigate surface clean, surface passivation, characterization and metallization of Photovoltaic materials and devices. Jinam then started his PhD candidature at the University of Albany in 2025.
Miss. Malvika Chainani (Fall 2023)
Malvika from Morris Hills High School, through Gifted and Talented Program, undertook an independent study in the field of Micro/Nanofabrication under the supervision of Dr. Zin.
Undergraduate Students
Ms. Sanchayita Dasmunshi (Present)
Sanchayita Dasmunshi is currently a second-year MSc in ECE at Rutgers, specializing in Signals and Information Processing. Sanchayita also completed MSc in Integrated Circuit Design, a joint degree program awarded by Technical University of Munich & Nanyang Technological University, Singapore prior to Rutgers. Sanchayita worked as a Hardware and Semiconductor Engineer with expertise in SoC/ASIC design, design verification, and functional validation at Micron Semiconductor Asia from 2021 to 2024. Sanchayita is working on developing scripts automating user-fee invoicing, current-voltage measurement algorithm, along with developing doped polysilicon PV device structures and characterizing tunneling current behaviors.
Bhoopal Ayyappa Taladi (Present)
Bhoopal Ayyappa Taladi is a master's student in Electrical and Computer Engineering currently working on photovoltaic cell characterization and analysis and trained in lithography process. His previous experience includes contributing to the e-Yantra Lab Setup Initiative (eLSI) by IIT Bombay, where he gained hands-on experience in embedded systems and hardware-based experimentation.
