Fees (per hour)
Click on each machine/process for more detailed information!
|
|
Machine/Process |
Rutgers |
Non-Rutgers |
Companies |
|---|---|---|---|---|
|
Processing Tools |
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| 1 | Atomic Layer Deposition | $45 | $65 | $85 |
| 2 | Ebeam (Liquid N2) | $35 | $55 | $65 |
| 3 | Ebeam (Angstorm) | $45 | $65 | $85 |
| 4 | Ion Milling (Angstorm) | $45 | $65 | $85 |
| 5 | PECVD (Plasma Therm) | $40 | $60 | $80 |
| 6 | PECVD (Unaxis) | $40 | $60 | $80 |
| 7 | Reactive Ion Etch (Trion) | $40 | $60 | $80 |
| 8 | Rapid Thermal Anneal (Doping) | $40 | $60 | $80 |
| 9 | Plasma Etcher (Low Vac) | $25 | $45 | $65 |
| 10 | Sputter (Denton-Explorer) | $35 | $55 | $75 |
| 11 | Sputter (Sys & Des Fab) | $35 | $65 | $85 |
| 12 | Furnace (Boron) | $50 | $70 | $90 |
| 13 | Furnace (Phosphorus) | $50 | $70 | $90 |
| 14 | Furnace (Oxidation) | $50 | $70 | $90 |
| 15 | Furnace (Anneal/FGA) | $50 | $70 | $90 |
| 16 | Box Furnace (Thermcraft)_O2 and N2 only | $35 | $55 | $75 |
| 17 | Box Furnace (ThermoScientific)_FGA and N2 only | $35 | $55 | $75 |
| 18 | Laser Scribing, Marking and Ablation (Innotech) | $15 | $35 | $55 |
| 19 | Ozone Dissolved Deionized Water | $35 | $55 | $75 |
| 20 | Wafer Spin Rinse Dryer | * | * | * |
| 21 | Lithography (Resist Spinner, Mask Aligner, Bake, Developing) | $45 | $65 | $85 |
| 22 | Lithography (Partial) -- Mask Aligner only | $20 | $40 | $60 |
| 23 | Lithography (Partial) -- Spin Resist and Bake only | $20 | $40 | $60 |
| 24 | Lithography (Partial) -- Wet Benches for Resist Development and Strip | $20 | $40 | $60 |
| 25 | Wet Bench #1 (Surface Clean Application) | $20 | $40 | $60 |
| 26 | Wet Bench #2 (Acid or Alkaline) | $20 | $40 | $60 |
| 27 | Wet Bench #3 (BOE, FeCl3, Cr or Au Etching) | $35 | $55 | $75 |
| 28 | Wet Bench #4 (Ozone Oxide) | $25 | $45 | $65 |
| 29 | Wet Bench_Stainless Steel for Resist Removal (Solvent Only) | $25 | $45 | $65 |
| 30 | Maskless Laser Lithography (Smart Print UV) | $60 | $80 | $100 |
| 31 | Polisher/Grinder | $25 | $45 | $65 |
| 32 | Electron-beam Lithography EBL (including PMMA Spin, Bake and Develop) | $70 | $90 | $110 |
| 33 | Electron-beam Lithography EBL only (without PMMA Spin, Bake and Develop) | $55 | $75 | $95 |
|
Characterization Instruments |
||||
| 1 | Detek Profilometer | $25 | $45 | $55 |
| 2 | 4-Point-Probe (Ossila) | $25 | $45 | $55 |
| 3 | Film Metric | $25 | $45 | $55 |
| 4 | Optical Microscope | * | * | * |
| 5 | Solar Simulator Sol3A Class AAA IEC/JIS/ASTM | $35 | $55 | $75 |
| 6 | Sinton Carrier Lifetime Tester | $25 | $45 | $65 |
| 7 | Film Sense Ellipsometry | $25 | $45 | $65 |
| 8 | Contact Resistivity Measurement | $25 | $45 | $65 |
| 9 | Impedance Analyzer | $25 | $45 | $65 |
| 10 | Photo-Electro Luminescence PL/EL Tool | $25 | $45 | $65 |
| 11 | UV-VIS-NIR Spectrophotometer | $35 | $55 | $75 |
| 12 | SU5000 Field Emission Variable pressure SEM 1.2nm @ 30kV | $45 | $65 | $85 |
| 13 | Energy Dispersive Spectroscopy | $45 | $65 | $85 |
|
Other Fee |
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| 1 | Cleanroom Access (flat rate the whole day) | $15 | $35 | $55 |
| * included in the cleanroom access fee | ||||
| add $25/hr and $50/hr, respectively for institutes and companies requiring cleanroom staff's assistance | ||||
| Non-Rutgers includes academic and research institutes | ||||
| Unlimited cleanroom access and usage fee for the whole year is $5,000/per person for academic and research institutes. | ||||