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Machine/Process
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Rutgers
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Non-Rutgers
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Companies
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Processing Tools
|
| 1 |
Atomic Layer Deposition |
$45 |
$65 |
$85 |
| 2 |
Ebeam (Liquid N2) |
$35 |
$55 |
$65 |
| 3 |
Ebeam (Angstorm) |
$45 |
$65 |
$85 |
| 4 |
Ion Milling (Angstorm) |
$45 |
$65 |
$85 |
| 5 |
PECVD (Plasma Therm) |
$40 |
$60 |
$80 |
| 6 |
PECVD (Unaxis) |
$40 |
$60 |
$80 |
| 7 |
Reactive Ion Etch (Trion) |
$40 |
$60 |
$80 |
| 8 |
Rapid Thermal Anneal (Doping) |
$40 |
$60 |
$80 |
| 9 |
Plasma Etcher (Low Vac) |
$25 |
$45 |
$65 |
| 10 |
Sputter (Denton-Explorer) |
$35 |
$55 |
$75 |
| 11 |
Sputter (Sys & Des Fab) |
$35 |
$65 |
$85 |
| 12 |
Furnace (Boron) |
$50 |
$70 |
$90 |
| 13 |
Furnace (Phosphorus) |
$50 |
$70 |
$90 |
| 14 |
Furnace (Oxidation) |
$50 |
$70 |
$90 |
| 15 |
Furnace (Anneal/FGA) |
$50 |
$70 |
$90 |
| 16 |
Box Furnace (Thermcraft)_O2 and N2 only |
$35 |
$55 |
$75 |
| 17 |
Box Furnace (ThermoScientific)_FGA and N2 only |
$35 |
$55 |
$75 |
| 18 |
Laser Scribing, Marking and Ablation (Innotech) |
$15 |
$35 |
$55 |
| 19 |
Ozone Dissolved Deionized Water |
$35 |
$55 |
$75 |
| 20 |
Wafer Spin Rinse Dryer |
* |
* |
* |
| 21 |
Lithography (Resist Spinner, Mask Aligner, Bake, Developing) |
$45 |
$65 |
$85 |
| 22 |
Lithography (Partial) -- Mask Aligner only |
$20 |
$40 |
$60 |
| 23 |
Lithography (Partial) -- Spin Resist and Bake only |
$20 |
$40 |
$60 |
| 24 |
Lithography (Partial) -- Wet Benches for Resist Development and Strip |
$20 |
$40 |
$60 |
| 25 |
Wet Bench #1 (Surface Clean Application) |
$20 |
$40 |
$60 |
| 26 |
Wet Bench #2 (Acid or Alkaline) |
$20 |
$40 |
$60 |
| 27 |
Wet Bench #3 (BOE, FeCl3, Cr or Au Etching) |
$35 |
$55 |
$75 |
| 28 |
Wet Bench #4 (Ozone Oxide) |
$25 |
$45 |
$65 |
| 29 |
Wet Bench_Stainless Steel for Resist Removal (Solvent Only) |
$25 |
$45 |
$65 |
| 30 |
Maskless Laser Lithography (Smart Print UV) |
$60 |
$80 |
$100 |
| 31 |
Polisher/Grinder |
$25 |
$45 |
$65 |
| 32 |
Electron-beam Lithography EBL (including PMMA Spin, Bake and Develop) |
$70 |
$90 |
$110 |
| 33 |
Electron-beam Lithography EBL only (without PMMA Spin, Bake and Develop) |
$55 |
$75 |
$95 |
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Characterization Instruments
|
| 1 |
Detek Profilometer |
$25 |
$45 |
$55 |
| 2 |
4-Point-Probe (Ossila) |
$25 |
$45 |
$55 |
| 3 |
Film Metric |
$25 |
$45 |
$55 |
| 4 |
Optical Microscope |
* |
* |
* |
| 5 |
Solar Simulator Sol3A Class AAA IEC/JIS/ASTM |
$35 |
$55 |
$75 |
| 6 |
Sinton Carrier Lifetime Tester |
$25 |
$45 |
$65 |
| 7 |
Film Sense Ellipsometry |
$25 |
$45 |
$65 |
| 8 |
Contact Resistivity Measurement |
$25 |
$45 |
$65 |
| 9 |
Impedance Analyzer |
$25 |
$45 |
$65 |
| 10 |
Photo-Electro Luminescence PL/EL Tool |
$25 |
$45 |
$65 |
| 11 |
UV-VIS-NIR Spectrophotometer |
$35 |
$55 |
$75 |
| 12 |
SU5000 Field Emission Variable pressure SEM 1.2nm @ 30kV |
$45 |
$65 |
$85 |
| 13 |
Energy Dispersive Spectroscopy |
$45 |
$65 |
$85 |
| 14 |
Electronic Probe Station |
$25 |
$45 |
$55 |
| 15 |
Agilent Impedance Analyzer |
$25 |
$45 |
$55 |
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Other Fee
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| 1 |
Cleanroom Access (flat rate the whole day) |
$15 |
$35 |
$55 |
| * included in the cleanroom access fee |
| add $112/hr for trainings or other tasks requiring staff-assistance |
| Non-Rutgers includes academic and research institutes |
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